Varian
3118
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Varian 3118 is an electron beam evaporator system for thin film deposition. The Varian 3118 includes substrate rotation, deposition controls, and cryogenic vacuum pumping support. The Varian 3118 is designed for applications such as metal evaporation, compound semiconductor processing, and optical coating.[1]
What it is
The Varian 3118 is an electron beam evaporator thin film deposition system.[3][1]
The Varian 3118 is a deposition tool manufactured by Varian.[2][4]
The Varian 3118 is an evaporator system used for thin film deposition.[2][1]
The Varian 3118 10 E E-Beam Evaporator is an integrated system that includes vacuum pumps, a chamber, mounting pieces, a chiller, a power unit, a sweep controller, and an optical monitor.[3]
How it works
The Varian 3118 uses electron beam evaporation to deposit thin films.[1]
The Varian 3118 includes a high voltage power supply, a beam controller, substrate rotation, deposition controls, and cryogenic pumping support.[1]
The Varian 3118 is configured with a slot rotating substrate holder and planetary shields.[1]
Where it fits in the process flow
Applications
The Varian 3118 is used for electron beam thin film deposition, metal evaporation, compound semiconductor processing, optical coating research, lift-off processes, semiconductor material research, and advanced materials development.[1]
The Varian 3118 is suited for university and institute research and development, as well as laboratory vacuum coating applications.[1]
What do the numbers mean?
Power & electrical3
Vacuum & pumping2
Wafer handling1
Optics & imaging1
Control & software1
Configuration & options3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 3118 10 E E-Beam | — | — | Listed as a separate model in the Varian 3118 family, with integrated vacuum pumps, chamber, mounting pieces, chiller, power unit, sweep controller, and optical monitor. | waferpedia.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 3118 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3118 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 3118 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3118 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3118 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 3118 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]3118 — Varian | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 6, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13622 is an RF match unit intended for PVD (Physical Vapor Deposition) described as a High Efficiency HE RF Match-Bias.
The Applied Materials 0020 12458 Part is an insulator, side match component for the Hdp-Cvd Ultima Plus system.