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UNECS-2000

MeasurementUlvac UNECS-2000 family
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The ULVAC UNECS-2000 is a spectroscopic ellipsometer used to measure the refractive index and thickness of thin films. The UNECS-2000 achieves high-speed measurement of 20ms per point using a snapshot measurement method. The UNECS-2000 has a compact sensor unit with no rotating mechanisms and no need for periodic maintenance.[1]

UlvacUNECS-2000
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What it is

The ULVAC UNECS-2000 is an ellipsometer used for measurement at UCLA Nanolab.[2][1]

The UNECS series of spectroscopic ellipsometers measure refractive index and thin-film thickness quickly and accurately.[1]

How it works

The ULVAC UNECS-2000 uses a snapshot measurement method.[1]

The ULVAC UNECS-2000 has a compact sensor unit and no rotating mechanism in the optical element.[1]

Where it fits in the process flow

General reference — not yet source-verified

Ellipsometry is a metrology step used after film growth or deposition to estimate thickness and optical properties without removing the film.

Applications

The ULVAC UNECS-2000 is used for thin-film thickness measurement and refractive-index measurement.[1]

  • Measurement of refractive index
  • Measurement of thin-film thickness

What do the numbers mean?

Optics & imaging3

Visible spectral range
Standard type: 530 nm to 750 nm; visible spectral type: 380 nm to 760 nm[1]
Accurate?
Spectral range (standard type)
530 nm to 750 nm[1]
Accurate?
Spectral range (visible type)
380 nm to 760 nm[1]
Accurate?

Dimensions & facilities2

Sensor unit
Light-weighted and very compact; no rotating mechanism; no periodic maintenance needed[1]
Accurate?
Sensor unit characteristics
Compact, light-weighted, no rotating mechanism, no periodic maintenance[1]
Accurate?

Configuration & options10

Model
UNECS-2000[1]
Accurate?
OEM
ULVAC[1]
Accurate?
Equipment type
Ellipsometer[1]
Accurate?
Measurement category
Measurement[2]
Accurate?
Use
Measures refractive index and thickness of thin film[1]
Accurate?
High-speed measurement
20 ms per point[1]
Accurate?
Measurement type
Spectroscopic ellipsometer[1]
Accurate?
Measured parameters
Refractive index and thickness of thin films[1]
Accurate?
Measurement speed
20 ms per point[1]
Accurate?
Measurement method
Snapshot measurement method[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the ULVAC UNECS-2000 measure?

The ULVAC UNECS-2000 measures refractive index and thin-film thickness.[1]

What measurement method does the ULVAC UNECS-2000 use?

The ULVAC UNECS-2000 uses a snapshot measurement method.[1]

Not publicly documented

The following facts about the UNECS-2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UNECS-2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UNECS-2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UNECS-2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the UNECS-2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the UNECS-2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanolab.ucla.edu — nanolab.ucla.edunanolab.ucla.edu
  2. [2]nanolab.ucla.edu — nanolab.ucla.edunanolab.ucla.edu
  3. [3]Equipment | UCLA Nanolab — nanolab.ucla.edunanolab.ucla.edu
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Last updated Oct 5, 2026.

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