Tokyo Electron
Precio XL Automatic Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Precio XL is an automatic wafer prober manufactured by Tokyo Electron. The model designation is Precio XL. The Precio XL belongs to the Test & Probe equipment category. The Precio XL includes hot and cold temperature capability. The Precio XL supports a 93K Direct Dock configuration. The Precio XL loads wafers through a single FOUP wafer loader mounted on the right side. The Precio XL provides a stage accuracy of 1.8 µm. The Precio XL supports probing force options of 200 kg and 300 kg. The Precio XL uses a linear-motor stage in automatic operation. The Precio XL supports 200 mm and 300 mm wafer sizes. The Precio XL provides Z-axis accuracy of 5 µm.[2][4][5]
How it works
General reference — not yet source-verifiedWafer probers bring a probe card containing fine needles into contact with the wafer surface. The prober aligns the wafer using fiducial marks and steps each die beneath the probe tips. Contact force and touchdown height determine signal integrity during electrical test.
Where it fits in the process flow
Applications
General reference — not yet source-verifiedAutomatic wafer probers support device characterization, yield screening, and speed binning during wafer test. Temperature-controlled probing enables testing of devices at specified thermal conditions.
What do the numbers mean?
Wafer handling4
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Precio XL Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio XL Automatic Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Precio XL Automatic Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precio XL Automatic Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio XL Automatic Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio XL Automatic Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]inventory listing
- [4]waferpedia.com — waferpedia.comwaferpedia.com
- [5]Precio XL - Tokyo Electron Limited | Wafer Probe System — semiconductor.directorysemiconductor.directory
Last updated Oct 11, 2026.
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