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Tokyo Electron

MB 2 730 Metal

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Tokyo Electron MB 2 730 Metal is a metal chemical vapor deposition (CVD) tool. The Tokyo Electron MB 2 730 Metal handles 6-inch wafers. The Tokyo Electron MB 2 730 Metal includes a loader SAT-Cont with spare, a transfer SAT-Cont, and a utility SAT-Cont.[1][2][3]

Tokyo Electron logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Tokyo Electron MB 2 730 Metal is a metal chemical vapor deposition tool.[2][3]

How it works

General reference — not yet source-verified

A chemical vapor deposition tool forms thin films by introducing reactive process gases into a controlled chamber where they produce a deposited layer on the wafer surface.

A metal deposition CVD tool is used for film formation in a vacuum-based process sequence that emphasizes controlled gas chemistry, temperature, and surface reaction conditions.

Where it fits in the process flow

General reference — not yet source-verified

A metal CVD tool sits in the thin-film deposition part of semiconductor manufacturing after earlier wafer preparation steps and before later patterning or integration steps.

Applications

The MB 2 730 Metal is used for metal film deposition on wafers.[2][3][1]

What do the numbers mean?

Wafer handling5

Loader SAT-Cont with spare[1]
Accurate?
Wafer size
6 inch[1]
Accurate?
Transfer SAT-Cont, Utility SAT-Cont, Loader SAT-Cont with spare[1]
Accurate?
Loader SAT-Cont with spare
Yes[1]
Accurate?
Transfer SAT-Cont
Yes[1]
Accurate?

Configuration & options5

Tranfer SAT-Cont[1]
Accurate?
Utility SAT-Cont[1]
Accurate?
Deposition type
Metal CVD[2]
Accurate?
Vintage year
1996[1]
Accurate?
Utility SAT-Cont
Yes[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of deposition does the MB 2 730 Metal perform?

The MB 2 730 Metal performs metal chemical vapor deposition (CVD).[1][2]

What wafer size does the MB 2 730 Metal handle?

The MB 2 730 Metal handles 6-inch wafers.[1][2]

Not publicly documented

The following facts about the MB 2 730 Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MB 2 730 Metal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MB 2 730 Metal are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MB 2 730 Metal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MB 2 730 Metal are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MB 2 730 Metal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Tokyo Electron MB 2 730 Metal family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 5, 2026.

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