Tescan
S8000X
The TESCAN S8000X is a FIB/SEM combining a plasma-source focused ion beam microscope and a high-resolution (BrightBeam) scanning electron microscope. The TESCAN S8000X uses a Xe+ ion plasma source capable of generating a focused beam up to 1 uA. The TESCAN S8000X includes a cryogenic stage and a sample transfer loadlock allowing work down to -160 C.[1]
What it is
The TESCAN S8000X is a versatile instrument for the characterization of materials. It combines a plasma-source focused ion beam microscope and a high-resolution BrightBeam scanning electron microscope.[1]
The instrument is equipped with advanced analytical capabilities, including Time-of-Flight Secondary Ion Mass Spectrometery and an Energy Dispersive x-ray spectrometer. It also includes a cryogenic stage, a sample transfer loadlock, and a cryogenic Kleindiek nanomanipulator.[1]
How it works
The focused ion beam microscope uses a Xe+ ion plasma source. The Xe plasma can generate a focused beam up to 1 uA, which allows very high milling rates and does not lead to deleterious ion implantation in the same way that Ga+ ions do.[1]
The BrightBeam SEM is a field-free, ultra-high resolution electron microscope whose optics allow improved resolution, even at low energies. This improves imaging of non-conducting samples.[1]
Time-of-Flight Secondary Ion Mass Spectrometery detects ions emitted from the sample, allowing chemical characterization. An Energy Dispersive x-ray spectrometer provides additional, complementary chemical characterization.[1]
Where it fits in the process flow
The instrument is used for characterization of materials. Its cryogenic stage and sample transfer loadlock allow work down to -160 C or introduction of frozen samples into the tool to be milled.[1]
A cryogenic Kleindiek nanomanipulator enables users to interact with the sample in-situ as well as lift-out frozen sections for subsequent TEM analysis.[1]
Applications
The BrightBeam SEM improves imaging of non-conducting samples. ToF-SIMS is especially useful in detecting light elements, including the discrimination of hydrogen and deuterium.[1]
The Xe plasma focused beam allows very high milling rates. The instrument is also equipped for additional, complementary chemical characterization with EDS.[1]
- Materials characterization
- Chemical characterization
- Detecting light elements including discrimination of hydrogen and deuterium
- Work with frozen samples
- In-situ sample interaction
- Lift-out of frozen sections for subsequent TEM analysis
What do the numbers mean?
Vacuum & pumping3
Optics & imaging3
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Cryogenic capabilityCryogenic stage and sample transfer loadlock allowing work down to -160 C or introduction of frozen samples[1]
- NanomanipulatorCryogenic Kleindiek nanomanipulator for in-situ interaction and lift-out of frozen sections for subsequent TEM analysis[1]
- Cryogenic stage temperature rangedown to -160 C[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of ion source does the FIB in the TESCAN S8000X use?
The focused ion beam uses a xenon (Xe⁺) plasma source.[1]
What is the maximum beam current the FIB can deliver?
The Xe plasma source can generate a focused beam up to 1 μA.[1]
How much faster is the milling rate compared to gallium-ion FIBs?
The milling rate can be up to 50 times faster than prior Ga⁺ ion technology.[1]
What analytical instruments are integrated with the S8000X?
The system includes a time-of-flight secondary ion mass spectrometer and an energy-dispersive X-ray spectrometer.[1]
What is the minimum temperature achievable with the cryogenic stage?
The cryogenic stage can cool the sample down to -160 °C.[1]
What is the special feature of the scanning electron microscope in this instrument?
The SEM, called BrightBeam, is a field-free, ultra-high-resolution column that provides improved resolution even at low electron energies.[1]
Not publicly documented
The following facts about the S8000X are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S8000X are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S8000X are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S8000X are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S8000X are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S8000X is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]nano.upenn.edu — nano.upenn.edunano.upenn.edu
Last updated Sep 21, 2026.
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