Waferpedia

SVG

8836 HPO Photoresist

SVG 8836 HPO Photoresist family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SVG 8836 HPO is a dual-track photoresist coater and developer from the SVG 8800 series. The SVG 8836 HPO processes wafers through a sequence of send, prime, chill, coat, bake, and receive steps for coating, and a similar sequence for developing. The SVG 8836 HPO supports 6-inch and 8-inch wafers.[1]

8836 HPO Photoresist — Inventory photo
Fig. 018836 HPO PhotoresistInventory photo[2]

How it works

The SVG 8836 HPO uses process sequences that include send, prime, chill, coat, bake, and receive. The SVG 8836 HPO also uses a send, bake, chill, develop, bake, and receive sequence.[1]

Applications

The SVG 8836 HPO is used for photoresist processing in semiconductor manufacturing. The SVG 8836 HPO is applied to wafer coating and developer operations.[2][1]

What do the numbers mean?

Wafer handling1

Wafer sizes
6 inch, 8 inch[2]
Accurate?

Configuration & options3

Process steps
Coating: Send-Prime-Chill-Coat-Bake-Receive; Developing: Send-Bake-Chill-Develop-Bake-Receive[1]
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Series
8800 series[1]
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Dual track[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Is the SVG 8836 HPO a single-track or dual-track system?

The SVG 8836 HPO is a dual-track coater and developer system.[1]

Not publicly documented

The following facts about the 8836 HPO Photoresist are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8836 HPO Photoresist are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 8836 HPO Photoresist are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 8836 HPO Photoresist are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 8836 HPO Photoresist are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 8836 HPO Photoresist is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
  2. [2]Inventory photo
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Last updated Oct 3, 2026.

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