SUSS MicroTec
Twin Gamma
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
SUSS MicroTec Twin Gamma is a coater and developer. SUSS MicroTec Twin Gamma is for 4 inch and 6 inch wafers. SUSS MicroTec Twin Gamma has separate coating and developing modules with an integrated wafer transfer station.[1]
How it works
The developer module contains three developer cups with spin speeds and acceleration identical to the coater cups. Each developer cup has one puddle developer nozzle and one deionized water nozzle, plus a backside rinse. Six hotplates and two coolplates, with the same specifications as in the coater module, support post-exposure bake and development. Another Genmark GB4S robot with needle gripper handles wafer transfer within the developer module. Temperature control is provided by six Julabo Compact Refrigerated circulators (one per coater cup and resist, one per developer cup for developer, and one for DI water) and two Julabo Recirculation Coolers for the coolplates and flange cooling. The chemical cabinet holds two 10-liter stainless steel solvent tanks and four 5-liter polyethylene developer tanks, all with change-tank systems.[1]
What do the numbers mean?
Wafer handling4
- System structure
- Separate coating and developing modules with integrated wafer transfer station[1]
Gas & chemistry2
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the SUSS Twin Gamma support?
The Twin Gamma supports 4-inch and 6-inch wafers.[1]
What is the spin speed range of the coater cups?
The coater cups have a spin speed range of 10 to 6000 rpm and acceleration up to 50000 rpm per second.[1]
How many hotplates does the coater module have?
The coater module has six hotplates, each contact type with vacuum and operating from 60 to 250 °C.[1]
What robot is used for wafer transfer?
Both the coater and developer modules use a Genmark GB4S robot with a needle gripper for wafer transfer.[1]
What type of developer does the Twin Gamma use?
The developer is TMAH-based with surfactant and is metal-free. The system has dedicated developer tanks made of polyethylene.[1]
Not publicly documented
The following facts about the Twin Gamma are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twin Gamma are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twin Gamma are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twin Gamma are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twin Gamma are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twin Gamma is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]f.machineryhost.com — f.machineryhost.comf.machineryhost.com
- [2]Equipment inventory listing
Last updated Sep 28, 2026.