Sumitomo

NV GSD HE

Ion Implantation Sumitomo NV GSD HE family

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The Sumitomo NV GSD HE is an ion implanter for 6-inch wafers. The Sumitomo NV GSD HE supports Full Disk, AL Solid Disk, and 150 mm disk types. The Sumitomo NV GSD HE has a maximum injection energy of 3,000 keV, varying by ion species.^[1]^[2]

NV GSD HE — Inventory photo — Fig. 01NV GSD HEInventory photo^[2]

What it is

The Sumitomo NV GSD HE is an ion implanter for 6-inch wafers.^[1]^[3]

How it works

The NV GSD HE supports a wafer tilt function with α + β ≤ ±11° adjustable.^[2]^[1]

Where it fits in the process flow

The NV GSD HE is configured for 6-inch wafers, with a 150 mm disk type and an option set that includes full disk and AL solid disk handling.^[2]^[1]

Applications

The NV GSD HE is used for ion implantation on 6-inch wafers.^[1]^[3]

What do the numbers mean?

Wafer handling5

17 wafers^[2]
Wafer Titlt Function: α + β ≤ ±11° adjustable^[2]
Wafer size: 6 inch^[2]
Wafer handling: 17 wafers^[1]
Wafer tilt function: α + β ≤ ±11° adjustable^[2]

Gas & chemistry2

Available Gas Types:^[2]
Available gas types: Ar (external supply); BF3 (SDS3 4X); Xe (3.4 L)^[2]

Configuration & options14

Disk Type:^[2]; Full Disk^[2]; AL Solid Disk^[2]; 150 mm^[2]; Ar (external supply)^[2]; BF3 (SDS3 4X)^[2]; Xe (3.4 L)^[2]; Maximum Injection Energy:^[2]; 3,000 keV (varies depending on ion species)^[2]
Manufacturer: Sumitomo^[2]
Model: NV GSD HE^[2]
Category: Ion Implantation^[1]
Disk type: Full Disk; AL Solid Disk; 150 mm^[2]
Maximum injection energy: 3,000 keV (varies depending on ion species)^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationAvailable Gas Types:^[2]
Available gas typesAr (external supply); BF3 (SDS3 4X); Xe (3.4 L)^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Sumitomo NV GSD HE handle?

The Sumitomo NV GSD HE is an ion implanter for 6-inch wafers.^[1]^[3]

What gas types are available on the NV GSD HE?

The NV GSD HE has available gas types of Ar, BF3, and Xe.^[2]^[1]

Does the NV GSD HE have a wafer tilt function?

The NV GSD HE has a wafer tilt function with α + β ≤ ±11° adjustable.^[2]^[1]

Not publicly documented

The following facts about the NV GSD HE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD HE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD HE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD HE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD HE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD HE is not on record.
Answerable by: an OEM datasheet or a fab qualification report