Spectra-Physics
482 Oven Control
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Spectra-Physics 482 Oven Control is a thermal/diffusion oven control system. The 482 Oven Control is configured with a Model 2200 Ion Laser Purge Air Pump.[1][2]
What it is
How it works
General reference — not yet source-verifiedAs a thermal/diffusion oven control system, the 482 Oven Control governs the temperature and gas flow within a furnace tube. Diffusion ovens typically consist of a heating element, a quartz process tube, and a control cabinet. The control system regulates ramp rates, soak times, and gas switching for processes such as oxidation, diffusion, and annealing.
Applications
General reference — not yet source-verifiedApplications include thermal oxidation of silicon to form gate dielectrics, diffusion of dopants such as boron or phosphorus, and thermal annealing to repair crystal damage or activate dopants. The system can also be used for chemical vapor deposition processes if configured with appropriate gas supplies.
What do the numbers mean?
Vacuum & pumping1
- With Model 2200 Ion Laser Purge Air Pump[2]
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationWith Model 2200 Ion Laser Purge Air Pump[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 482 Oven Control are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 482 Oven Control are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 482 Oven Control are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 482 Oven Control are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 482 Oven Control are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 482 Oven Control are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Spectra-Physics 482 Oven Control family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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