SMC
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The SMC HRS 200 AN 46 S Chiller is a chiller with a rated current of 17 A and a capacity of 10 kA. The SMC HRS 200 AN 46 S Chiller supports power inputs of 380-415 V at 50 Hz and 460-480 V at 60 Hz. The SMC HRS 200 AN 46 S Chiller was manufactured in 2020.[1]

The SMC HRS 200 AN 46 S Chiller is a chiller used as lab and support equipment.
A chiller removes heat from a connected load and transfers that heat to a secondary medium so the load can remain at a controlled temperature.
Process chillers in laboratory and support settings circulate conditioned fluid through external equipment and return it after heat exchange.
The SMC HRS 200 AN 46 S Chiller belongs in support infrastructure rather than in the primary wafer-processing path.
A chiller commonly supports tools and subsystems that need stable thermal control during operation.
The SMC HRS 200 AN 46 S Chiller is used in laboratory and equipment-support contexts where thermal management is required.
A chiller of this class can support instrumentation, process modules, and other heat-generating equipment that benefits from controlled cooling.
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
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The equipment is a chiller.[1]
The following facts about the HRS 200 AN 46 S Chiller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRS 200 AN 46 S Chiller are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HRS 200 AN 46 S Chiller are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HRS 200 AN 46 S Chiller are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the HRS 200 AN 46 S Chiller are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the HRS 200 AN 46 S Chiller is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 4, 2026.
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