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Semitool

ST 860 SRD

Semitool ST 860 SRD family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Semitool ST 860 SRD is a spin rinse dryer used in semiconductor manufacturing.[1][2]

What do the numbers mean?

Wafer handling2

Wafer sizes (source 1)
2, 3, 4 inch[1]
Accurate?
Wafer size (source 2)
up to 125 mm[2]
Accurate?

Configuration & options1

Double Stack SRD[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ST-860 SRD Double Stack——Double stack configuration of the ST-860 SRDfabsurplus.com[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the ST 860 SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ST 860 SRD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the ST 860 SRD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ST 860 SRD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ST 860 SRD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the ST 860 SRD are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Sep 27, 2026.

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