Semitool
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The Semitool ST 270 D SRD is a spin rinse dryer for wet processing and clean operations.[1]
A spin rinse dryer uses centrifugal rotation to remove liquid from wafers after wet processing. The machine rinses the wafer surface and then spins the wafers so residual liquid drains away and evaporates more quickly.
A spin rinse dryer sits in wet bench and clean process flow after steps that leave liquid on the wafer surface. The machine supports transition from rinse and wash steps toward dry handling and later process operations.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ST-270D SRD Dual Stack Spin Rinser/Dryer | — | — | — | semistarcorp.com[2] |
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The following facts about the ST 270 D SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ST 270 D SRD are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ST 270 D SRD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ST 270 D SRD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ST 270 D SRD is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ST 270 D SRD are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 7, 2026.
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