Semics
Opus 3 SLT
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Semics Opus 3 SLT is a wafer probe system. The Semics Opus 3 SLT is an automatic tool. The Semics Opus 3 SLT supports 8-inch and 12-inch wafers.[1][2]
What it is
General reference — not yet source-verifiedA wafer probe system contacts device pads on a wafer with probes so electrical testing can be performed before later packaging steps. A system of this class is used as a wafer-level test platform in semiconductor manufacturing and development.
How it works
General reference — not yet source-verifiedA wafer probe system generally moves probes into contact with the wafer pads, measures electrical response, and records device behavior under test conditions. A class like this is commonly arranged around precise wafer positioning, probe alignment, and data acquisition rather than wafer processing or fabrication.
Where it fits in the process flow
General reference — not yet source-verifiedA wafer probe system sits in the test flow before wafer singulation and packaging. The Semics Opus 3 SLT is suited to wafer-level electrical verification and characterization on full wafers.
What do the numbers mean?
Wafer handling8
Optics & imaging1
- OCR Image Recognition and Auto Needle Alignment
- Yes (upward-looking camera, fully automatic)[3]
Performance6
Control & software1
Dimensions & facilities1
Configuration & options16
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Accretech 3000 EX— Same function class: Test & Probe, nullCompare in depthsource[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Semics Opus 3 SLT support?
The Semics Opus 3 SLT supports 8-inch and 12-inch wafer probing.[3][5][6][1]
Not publicly documented
The following facts about the Opus 3 SLT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Opus 3 SLT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Opus 3 SLT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Opus 3 SLT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Opus 3 SLT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Opus 3 SLT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]semiconductor.directory — semiconductor.directorysemiconductor.directory
- [2]Inventory photo
- [3]antpedia.com — antpedia.comantpedia.com
- [4]waferpedia.comwaferpedia.com
- [5]高低温全自动探针台-Opus 3 SLT共享 — antpedia.comantpedia.com
- [6]高低温全自动探针台Opus3SLT共享 — wiki.antpedia.comwiki.antpedia.com
Last updated Oct 10, 2026.
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The Accretech / TSK 3000 EX is a prober described as new and unused, with tri-temp capability and 200 VAC single-phase power requirements.
The KLA 1007 is a wafer prober manufactured by KLA.
