SCREEN
SU 3200 Single Wafer Processing
The SU-3200 is a single-wafer cleaner from SCREEN Semiconductor Solutions. The SU-3200 is expandable up to 12 chambers and achieves throughput up to 800 wafers per hour. The SU-3200 processes 12-inch (300 mm) wafers and supports processes such as SOM, SPM, SC1/SC2, O3W, and DHF.[1][2]
What it is
The SU 3200 is a single-wafer cleaner manufactured by SCREEN Semiconductor Solutions. The SU 3200 handles wafers of 12 inch diameter. The SU 3200 supports expansion up to 12 process chambers. The SU 3200 achieves a throughput of up to 800 wafers per hour. The twelve process chambers are arranged in four three-level towers. The SU 3200 uses software revision P2485STD00V2485STD00.[2][3][1]
How it works
The SU 3200 pairs its process chambers with fluid supply units. The pair configuration and the tray construction of the fluid units ease specification changes and maintenance. The chemical supply system sits at the rear of the SU 3200, shortening the path from the chemical source to the wafer. The chamber interior has a volume about one-third that of the preceding design. The reduced volume improves atmosphere replacement and cleanliness. An air balance guide provides uniform downflow from the fan filter units. An air protection nozzle technology gives watermark-free drying. Advanced splash protection technology reduces chemical splash in the chamber. The SU 3200 can be fitted with either dynamic direct injection or a cabinet-type chemical supply system. The SU 3200 uses a Kawasaki robot as the wafer handler. The SU 3200 supports the SECS/GEMS communication protocol.[2][1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Multiple chambers down (hardware issues)
What do the numbers mean?
Power & electrical2
Wafer handling3
Gas & chemistry1
- Chemical supply options
- dynamic direct injection (DDI) or cabinet-type chemical supply system[1]
Control & software4
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SU 3200 Single Wafer Processing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3200 Single Wafer Processing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 3200 Single Wafer Processing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 3200 Single Wafer Processing are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SU 3200 Single Wafer Processing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU 3200 Single Wafer Processing are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]screen.co.jp — screen.co.jpscreen.co.jp
- [2]Inventory photo
- [3]Inventory photo
Last updated Sep 30, 2026.
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