Rigaku
TXRF 3760 XRF
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Rigaku TXRF 3760 XRF Spectrometer performs rapid elemental analysis on 8-inch wafers. The Rigaku TXRF 3760 features a 3-beam TXRF system with a nitrogen-free detector and an in-vacuum wafer robotic transfer system.[1]
Wafer size
In-Vacuum Wafer Robotic Transfer System
Vacuum
In-Vacuum Wafer Robotic Transfer System[1]
Optics
Sweeping TXRF Software[1]
What is it?
Applications
The TXRF 3760's rapid elemental analysis capability supports high-throughput screening of wafers for contamination. The three-beam, nitrogen-free detector, and sweeping optics are designed for routine use in a production environment.[1]
What do the numbers mean?
Vacuum & pumping2
Wafer handling1
Optics & imaging3
Control & software1
Configuration & options3
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- 8"
- 3 Beam TXRF System
- Nitrogen-Free Detector
- Sample Stage System
- In-Vacuum Wafer Robotic Transfer System
- ECS/GEM Communication Software
- Optics: Sweeping TXRF Software
- XRF spectrometer for rapid elemental analysis
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Rigaku TXRF 3760 support?
The Rigaku TXRF 3760 supports 8-inch wafers.[1]
What type of detector does the TXRF 3760 use?
The TXRF 3760 uses a nitrogen-free detector.[1]
Does the TXRF 3760 have any special optical capability?
Yes, the TXRF 3760 is equipped with sweeping TXRF software and has ZEE-TXRF capability.[1]
Not publicly documented
The following facts about the TXRF 3760 XRF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TXRF 3760 XRF are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TXRF 3760 XRF are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TXRF 3760 XRF are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TXRF 3760 XRF are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TXRF 3760 XRF is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 24, 2026.
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