Pfeiffer

ADS 602 H

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The Adixen ADS 602 H is a multistage Roots dry pump from the ADP/ADS Series Two. The ADS 602 H is the harsh-duty variant designed for semiconductor manufacturing. The ADS 602 H has an ultimate pressure of 5×10⁻⁴ mbar and a nominal flow rate of 480 m³/h at 50 Hz.^[1]^[2]

PfeifferADS 602 H

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Power

5×10⁻⁴ mbar^[2]

Vacuum

Multistage Roots dry pump^[1]

What it is

The Pfeiffer ADS 602 H is a multistage Roots dry pump used in vacuum pumping applications.^[1]^[3]

How it works

The ADS 602 H uses water cooling, an inert gas purge connection, and electrical connection to a main power supply as part of its operating setup.^[1]^[3]

What do the numbers mean?

Power & electrical6

Ultimate Pressure (60 Hz): 5×10⁻⁴ mbar^[2]
Ultimate Pressure (50 Hz): 8×10⁻⁴ mbar^[2]
Nominal Flow Rate (50 Hz, without converter): 480 m³/h^[2]
Nominal Flow Rate (60 Hz, without converter): 560 m³/h^[2]
Nominal Power: 3 kW^[2]
Supply Voltage: 3 Ph 200/480 V^[2]

Vacuum & pumping3

Type: Multistage Roots dry pump^[1]
Max Continuous Inlet Pressure: 10 mbar^[2]
Exhaust Port: DN 40 ISO-KF^[2]

Dimensions & facilities3

Cooling Water Flow Rate: 60 l/h^[2]
Cooling Water Input Temperature Range: +10°C to +35°C^[1]
Weight: 400 kg^[2]

Configuration & options4

N2 Purge Flow Rate: 0 to 50 sl/mn^[2]
Rotation Speed: 3000 to 3600 rpm^[2]
Ambient Temperature Range: 5 to 40°C^[2]
Inlet Port: DN 100 ISO-K^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
ADS 602 P	—	—	Process duty variant	ptbsales.com^[2]
ADS 602 LM	—	—	Light to medium duty variant	ptbsales.com^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

TypeMultistage Roots dry pump^[1]
Ultimate Pressure (60 Hz)5×10⁻⁴ mbar^[2]
Ultimate Pressure (50 Hz)8×10⁻⁴ mbar^[2]
Nominal Flow Rate (50 Hz, without converter)480 m³/h^[2]
Nominal Flow Rate (60 Hz, without converter)560 m³/h^[2]
Nominal Power3 kW^[2]
Supply Voltage3 Ph 200/480 V^[2]
Max Continuous Inlet Pressure10 mbar^[2]
Exhaust PortDN 40 ISO-KF^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of pump is the ADS 602 H?

The ADS 602 H is a multistage Roots dry pump.^[1]^[3]

Which series does the ADS 602 H belong to?

The ADS 602 H belongs to the ADP and ADS Series Two dry pump range.^[1]^[3]

What utilities are part of the ADS 602 H setup?

The ADS 602 H setup includes connection to a cooling circuit, an inert gas purge connection, and electrical connection to the main power supply.^[1]^[3]

Not publicly documented

The following facts about the ADS 602 H are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ADS 602 H are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ADS 602 H are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ADS 602 H are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ADS 602 H is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ADS 602 H are on record.
Answerable by: an OEM parts catalog or a service engineer