Orient Service
S 1861 14
What it is
The Orient Service S 1861 14 is a plasma-enhanced chemical vapor deposition (PECVD) system. The system is configured for use with process gases including SiO2, HCl, HF, NOx, and NH3.[3][2][1]
How it works
General reference — not yet source-verifiedPlasma-enhanced chemical vapor deposition combines a vacuum chamber with a gas delivery system and a plasma source, such as a radio-frequency or microwave generator. The plasma dissociates precursor gases, creating reactive species that deposit a solid film on the substrate surface. The system allows fine control over film composition and thickness.
What do the numbers mean?
Vacuum & pumping2
Gas & chemistry2
Configuration & options3
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Applied Materials Producer SE— Same function class: Deposition, nullCompare in depthsource[1]
- Applied Materials P 5000 Mark II DLH— Same function class: Deposition, nullCompare in depthsource[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the S 1861 14 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 1861 14 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 1861 14 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 1861 14 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 1861 14 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 1861 14 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]inventory listing
Last updated Sep 28, 2026.
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