Waferpedia

Ontrak

DSS 200 Synergy

Wet Processing / CleanOntrak DSS 200 family
Research Quality: 40% complete
DSS 200 Synergy — Inventory photo
Fig. 01DSS 200 SynergyInventory photo[1]

What it is

The Ontrak DSS 200 Synergy is a wet processing system designed for semiconductor manufacturing.[1][2]

What do the numbers mean?

Power & electrical5

Voltage
100 VAC[1]
Accurate?
Frequency
50 Hz[1]
Accurate?
Single Phase[1]
Accurate?
Voltage
110 VAC[2]
Accurate?
Phase
Single Phase[1]
Accurate?

Configuration & options10

Breaker Size
20 A[1]
Accurate?
Rating of Largest Load
8 A[1]
Accurate?
Full Load Current
14 A[1]
Accurate?
Single Load[2]
Accurate?
Breaker Size
10 A[2]
Accurate?
Rating of Largest Load
4 A[2]
Accurate?
Full Load Current
7 A[2]
Accurate?
Process
Oxide[2]
Accurate?
Vintage
1997[1]
Accurate?
Vintage
1998[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage100 VAC[1]
  • Frequency50 Hz[1]
  • ConfigurationSingle Phase[1]
  • Voltage110 VAC[2]
  • PhaseSingle Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Is the system suitable for single-wafer processing or batch processing?General reference — not yet source-verified

Machines of this class are available in both configurations. Single-wafer systems offer better process uniformity and cross-contamination control, while batch systems provide higher throughput for less critical cleaning steps. The choice depends on the production requirements.

How is wafer drying achieved after the wet cleaning process?General reference — not yet source-verified

Drying is typically performed using centrifugal spin-drying, Marangoni drying with isopropyl alcohol vapor, or heated nitrogen blow-off. The method is chosen to prevent watermarks and pattern collapse on fine structures.

Not publicly documented

The following facts about the DSS 200 Synergy are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSS 200 Synergy are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DSS 200 Synergy are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DSS 200 Synergy are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DSS 200 Synergy are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DSS 200 Synergy is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Oct 10, 2026.

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