Onto Innovation
Atlas 1000-00493 Metrology
How it works
The Atlas 1000-00493 uses a Kawasaki linear track robot for wafer handling. The machine uses a dual TDK E3 FOUP loader and an X, Y, Z, T stage for positioning.[1][2]
The Atlas 1000-00493 uses visible halogen illumination in one measurement mode and ultraviolet deuterium illumination in another. The system also uses xenon illumination over a broad visible-to-near-infrared range for small-spot inspection or measurement.[1][2]
What do the numbers mean?
Wafer handling3
Optics & imaging6
- Lamp / Wavelength:[1]
Configuration & options10
- Spot Size:[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Atlas 1000-00493 Metrology are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Atlas 1000-00493 Metrology are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Atlas 1000-00493 Metrology are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Atlas 1000-00493 Metrology are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Atlas 1000-00493 Metrology are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Atlas 1000-00493 Metrology is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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