Waferpedia

Nikon

L 200 N

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The L 200 N is a reflected-light instrument for inspection work on semiconductor and related industrial substrates. The model supports integration with a wafer loader for wafer inspection tasks.[2]

How it works

The L 200 N uses optical microscopy to inspect surfaces and patterns at high precision. The microscope supports brightfield, darkfield, polarizing, differential interference contrast, and epi-fluorescence observation modes.[2]

The L 200 N uses a reflected-light optical path and can be configured with a motorized universal sextuple nosepiece. The microscope provides fine focus and stage motion controls for precise manual inspection work.[2]

Where it fits in the process flow

The L 200 N can support inspection of bare wafers and low-contrast samples. The microscope's focusing and contrast methods are intended to make alignment, feature review, and surface inspection more practical on production materials.[2]

Applications

The L 200 N is used for inspection of integrated circuits, flat panel displays, large scale integration electronic devices, wafers, reticles, and other substrates. The model is also positioned for semiconductor and photovoltaic device inspection.[2]

What do the numbers mean?

Wafer handling4

Wafer size
w/ TH 200 Wafer Loader[1]
Accurate?
Wafer size
8 inch[1]
Accurate?
Wafer loader
TH 200 Wafer Loader[1]
Accurate?
Inspection use
Inspection of integrated circuits, flat panel displays, large scale integration electronic devices, wafers, and other substrates[2]
Accurate?

Configuration & options3

OEM
Nikon[1]
Accurate?
Model
L 200 N[1]
Accurate?
Equipment type
Microscope[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the L 200 N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the L 200 N are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the L 200 N are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the L 200 N are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the L 200 N are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the L 200 N is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]industry.nikon.com — industry.nikon.comindustry.nikon.com
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Last updated Oct 11, 2026.

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