MPI
TS150
The MPI TS150 is a probe station designed for electrical testing on wafers or chips. The MPI TS150 supports a maximum of 4 independent terminals plus additional chuck grounding. The MPI TS150 is coupled to an Agilent 4155C Semiconductor Parameter Analyzer for DC characterization and a Zürich Instruments MFIA for AC characterization.[1]
Plate 01TS150 200 Probe System Overview. (Обзор зондовых станций TS150 и TS200)
TBS MoscowWatch on YouTube
Wafer size
6"
Power
to the chuck for conductive substrates[1]
Optics
Selectable 4 quadrants LED illumination[1]
What it is
A probe station is a type of semiconductor test equipment used to make electrical contact with devices on a wafer or die for measurement and characterization. The MPI TS150 is a manual probe station designed for electrical testing on wafers or chips. The station supports up to four independent terminals plus additional chuck grounding. The chuck is compatible with wafer sizes up to 6 inches, as well as chip or partial wafers.[1]
How it works
The MPI TS150 uses a fine-glide chuck stage mounted on a highly stable granite base. The chuck stage offers both coarse and fine X-Y travel ranges of 150 mm x 150 mm and 10 mm x 10 mm, respectively. Probe tips are mounted on true X,Y,Z micro-positioners (MPI PM100) with interchangeable tungsten contact tips. Binocular optics with a digital camera and selectable four-quadrant LED illumination allow the operator to center the probe tips on the contact pads. Three-axis movement of the probe tips via manual micro-manipulators enables soft and precise mechanical contact with the pads.[1]
What can it run?
Process applications and technology nodes documented for this tool.
- Electrical testing on wafers
- Electrical testing on chips
- DC characterization of microelectronic devices
- AC characterization of devices under test
- Resistance measurements
- Diode measurements
- Transistor measurements
- 2-point measurements
- 4-point measurements
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The source warns of shock hazard during measurement.
- The source states probe needles have very sharp tungsten carbide tips and can be damaged by crash or contamination.
- The source warns not to use the probes for mechanical testing or machining.
What do the numbers mean?
Power & electrical17
Wafer handling12
Optics & imaging8
Control & software2
Configuration & options19
- Probe micro-positioners
- MPI PM100 true X,Y,Z micro-positioners with interchangeable tungsten (W) contact tips (two different diameter available)[1]
- DC measurement unit
- Agilent 4155C Semiconductor Parameter Analyzer with 4x Medium-power SMU, 2xVSU and 2xVMU[1]
- Switching box configurations
- 6 configuration options for standard applications such as FET, bipolar transistors, diodes, 2-points and 4-points general measurements[1]
- AC test fixture
- MFITF can be mounted on the MFIA for rapid testing of wire-bonded surface-mounted devices[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Measurement capabilityDesigned for electrical testing on wafers or chips[1]
- Additional electrical connectionto the chuck for conductive substrates[1]
- DC voltage and current capability+/- 40 Volts and +/- 100 mA measurement unit (SMU)[1]
- AC signal frequencyDC to 5 MHz[1]
- AC signal voltage0 to 2.1 V RMS[1]
- DC bias (2 probes)+/- 10 Volts[1]
- DC bias (4 probes)+/- 3 Volts[1]
- DC voltage range+/-40 Volts[1]
- AC signal frequency rangeDC to 5 MHz[1]
- AC signal voltage range0 to 2.1 V RMS[1]
- DC bias range (2 probes)+/-10 Volts[1]
- DC bias range (4 probes)+/-3 Volts[1]
- UseElectrical testing on wafers or chips[1]
- DC measurement voltage+/- 40 Volts[1]
- DC measurement resolution (voltage)0.2 microvolt[1]
- AC DC bias (2 probes)+/- 10 Volts[1]
- AC DC bias (4 probes)+/- 3 Volts[1]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- MPI TS150 User ManualManualepfl.ch
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes are compatible with the MPI TS150?
The chuck is compatible with wafer sizes up to 6 inches, as well as chip or part of wafers.[1]
What analyzers are coupled to the MPI TS150?
The probe station is coupled to an Agilent 4155C Semiconductor Parameter Analyzer for DC measurements and a Zürich Instruments MFIA multi-frequency impedance analyzer for AC measurements.[1]
What are the voltage and current limits for the DC measurement system?
The DC measurement system has a maximum voltage of ±40 V and a maximum current of ±100 mA per SMU, with a measurement resolution of 10 femtoamps and 0.2 microvolts.[1]
Not publicly documented
The following facts about the TS150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS150 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TS150 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TS150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the TS150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TS150 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Oct 8, 2026.
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