Lam Research
Gasonics L 3510 Asher / Stripper
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Gasonics L3510 is a downstream plasma asher used for photoresist stripping and semiconductor cleaning. The Gasonics L3510 utilizes a microwave plasma source at 2.45 GHz to generate monatomic oxygen for ashing. The Gasonics L3510 supports wafer sizes from 75 mm to 200 mm.[1][2]
What it is
The Gasonics L 3510 is a downstream microwave plasma asher designed for photoresist removal. The L 3510 utilizes a patented microwave plasma source and the production-proven L-Series platform. The system supports wafer sizes up to 8 inches (200 mm).[3][1][2]
How it works
The Gasonics L 3510 generates plasma using a microwave source operating at 2.45 GHz. The downstream configuration means that plasma is created in a chamber separate from the wafer, and reactive species are transported to the wafer surface. The system includes platen and lamp heating to control wafer temperature. An integrated robotic wafer transfer system handles wafers automatically.[1][2]
Applications
The Gasonics L 3510 is used for photoresist stripping, bulk photoresist removal, implanted and damaged resist removal, descum processes, semiconductor wafer cleaning, low-damage plasma cleaning, non-oxidizing metal processing, compound semiconductor processing, and MEMS process applications. The L 3510 is also suitable for university and research institute environments, pilot production, and full-scale semiconductor fabrication.[1][2]
What do the numbers mean?
Vacuum & pumping1
Wafer handling3
Gas & chemistry1
Performance1
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Gasonics L 3510 Asher / Stripper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics L 3510 Asher / Stripper are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics L 3510 Asher / Stripper are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics L 3510 Asher / Stripper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics L 3510 Asher / Stripper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics L 3510 Asher / Stripper is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]allwin21.com — allwin21.comallwin21.com
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [3]Equipment inventory listing
Last updated Sep 23, 2026.
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