Waferpedia

KLA

Solid State

Metrology & InspectionKLA Solid State family
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KLA Solid State is a KLA metrology and inspection family. KLA Solid State includes the KLA Solid State Laser. KLA Solid State Laser is a solid-state laser upgrade for KLA AIT II and XP series systems.[1][2]

Solid State — Inventory photo
Fig. 01Solid StateInventory photo[3]

Power

New Solid State Laser and Power Supply[3]

Optics

KLA Solid State Laser[1]

What it is

The KLA Solid State Laser is a solid-state laser upgrade kit designed for KLA AIT II and XP series inspection systems. The upgrade replaces the original laser and power supply in AIT II, AIT XP, and AIT XP+ systems with a new solid-state laser and accompanying power supply unit.[3][1][7]

What do the numbers mean?

Power & electrical1

New Solid State Laser and Power Supply[3]
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Optics & imaging2

Model entry
KLA Solid State Laser[1]
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Description
solid-state laser upgrade for KLA AIT II and XP series systems[1]
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Configuration & options6

Upgrade for KLA AIT II & XP Series Systems[7]
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AIT II, AIT XP & AIT XP+ Systems[3]
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Upgrade for KLA PN 2213-75 TSLKTB[3]
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OEM
KLA[7]
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Category
Metrology & Inspection[7]
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Family entry
KLA Solid State family[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationNew Solid State Laser and Power Supply[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Which KLA inspection systems is the Solid State Laser upgrade compatible with?

The upgrade is compatible with KLA AIT II, AIT XP, and AIT XP+ systems.[3]

What is the KLA part number that the upgrade replaces?

The upgrade replaces KLA part number 2213-75 TSLKTB.[3]

Not publicly documented

The following facts about the Solid State are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Solid State are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Solid State are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Solid State are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Solid State are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Solid State is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Solid State Battery Summit | KLA — kla.comkla.com
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]waferpedia.com — waferpedia.comwaferpedia.com
  8. [8]Solid-state drive - Wikipedia — en.wikipedia.orgen.wikipedia.org
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Last updated Oct 10, 2026.

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