KLA
P-20H
The KLA P-20H is a stylus profilometer. The KLA P-20H uses a sharp stylus with a 2 µm tip radius. The KLA P-20H is capable of 3-D surface imaging.[1]
Plate 01Tencor P20H Step Height Measurement #38497
Bid ServicellcWatch on YouTubePlate 02Tencor P20H Long Scan Profiler
Bid ServicellcWatch on YouTubePlate 03Tencor P20H Profiler #38497
Bid ServicellcWatch on YouTube
What it is
The Tencor P-20H is a stylus profilometer used for quantitative surface topography measurement. The instrument uses a sharp stylus with a 2 µm tip radius and a 60° cone angle. The P-20H has a vertical range of 325 µm and roughly nanometer-scale vertical resolution. The precision stage has an 8 inch movement range.[1]
How it works
During measurement the stylus is held at a fixed position while the sample is scanned on a precision translation stage. The vertical deflection of the stylus is sensed by a capacitive sensor element, converting mechanical displacement into an electrical signal. The system can acquire both line scans (two-dimensional profiles) and area scans (three-dimensional surface maps).[1]
Applications
General reference — not yet source-verifiedStylus profilometers are also used for characterizing MEMS structures, reading head structures, and any process step where precise surface profile information is required. The contact measurement method provides high vertical resolution over a large range.
- Measuring thin-film thickness across a patterned step
- Wafer bow for film stress analysis
- Quantitative surface roughness measurements
- 3-D surface imaging
- Line scans
- Area scans
What do the numbers mean?
Optics & imaging1
Performance1
Configuration & options10
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurement principle do contact profilometers use?General reference — not yet source-verified
Contact profilometers use a physical stylus that contacts the sample surface and moves along a scan path. The vertical motion of the stylus is converted into an electrical signal by a transducer, producing a height profile of the surface.
What types of samples can be measured with a contact profilometer?General reference — not yet source-verified
Contact profilometers can measure a wide range of solid samples, including silicon wafers, glass substrates, coated surfaces, and metal or polymer parts. The sample must be clean, dry, and able to withstand light stylus contact without damage.
Is sample preparation required before measurement?General reference — not yet source-verified
Minimal sample preparation is required. Samples should be clean and free of loose particles that could interfere with the stylus or scratch the surface. For very soft or delicate materials, care must be taken to avoid stylus-induced deformation.
What are the limitations of contact profilometry?General reference — not yet source-verified
Contact profilometry is a slow, line-scan technique and does not provide area maps as quickly as optical methods. The physical contact may damage soft or fragile surfaces. The stylus size limits the ability to resolve very small features, and steep sidewalls can cause measurement artifacts.
How does contact profilometry differ from other surface measurement methods?General reference — not yet source-verified
Contact profilometry directly measures surface height with high vertical resolution and is insensitive to surface reflectivity or transparency. In contrast, optical methods (e.g., interferometry, confocal microscopy) are non-contact and faster but may struggle with transparent or highly reflective surfaces, or with steep slopes.
Not publicly documented
The following facts about the P-20H are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P-20H are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P-20H are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P-20H are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P-20H are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P-20H is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [2]Equipment Page | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
- [3]Request Equipment Training or Service | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
Last updated Oct 3, 2026.
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