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KLA

OP 2600 Film Thickness Measurement

KLA OP 2600 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA / Therma-wave OP 2600 is a film thickness measurement tool. The OP 2600 handles 8-inch wafers. The OP 2600 runs software version 3.0K14.[1][2][3]

OP 2600 Film Thickness Measurement — Inventory photo
Fig. 01OP 2600 Film Thickness MeasurementInventory photo[1]

What it is

The KLA OP 2600 is a film thickness measurement tool.[1][2][3]

Applications

The OP 2600 is used for measuring film thickness on semiconductor wafers.[1][2][3]

What do the numbers mean?

Wafer handling2

Wafer Size
8 inch[1]
Accurate?
Wafer Sizes
8 inch[1]
Accurate?

Control & software2

Software
3.0K14[1]
Accurate?
Software Version
3.0K14[1]
Accurate?

Configuration & options2

Vintage (year)
1995[2]
Accurate?
Vintage
1995[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model of this equipment?

The model is OP 2600.[1][2][3]

Not publicly documented

The following facts about the OP 2600 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OP 2600 Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the OP 2600 Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the OP 2600 Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OP 2600 Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OP 2600 Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
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Last updated Oct 3, 2026.

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