KLA
eDR 5200 +
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The KLA eDR 5200 + is a metrology and inspection system in KLA's eDR family.[5][3]
The KLA eDR 5200 + DR-SEM is a defect review scanning electron microscope system.[2]
How it works
Where it fits in the process flow
KLA's defect inspection and metrology products support yield management throughout semiconductor fabrication.[5]
Applications
The KLA eDR 5200 + is used for defect review, defect classification, and defect characterization in wafer processing.[2]
KLA's metrology and inspection portfolio is used in integrated circuit manufacturing and in related industries that include wafer manufacturing, mask manufacturing, solar process development and control, medical device manufacturing, light emitting diode manufacturing, data storage manufacturing, and general materials research.[5]
What do the numbers mean?
Optics & imaging1
Configuration & options5
- Parts Machine[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| eDR-5200 PLUS | — | 2009 | described as a defect review SEM with defect classification capability; listed as 300 mm | fabsurplus.com[4] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the KLA eDR 5200 + used for?
The KLA eDR 5200 + is used for defect review, defect classification, and defect characterization in wafer processing.[2]
What broader process areas are covered by KLA's metrology and inspection portfolio?
KLA's metrology and inspection portfolio is used throughout semiconductor fabrication and also in wafer manufacturing, mask manufacturing, solar process development and control, medical device manufacturing, light emitting diode manufacturing, data storage manufacturing, and general materials research.[5]
Not publicly documented
The following facts about the eDR 5200 + are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the eDR 5200 + are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the eDR 5200 + are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the eDR 5200 + are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the eDR 5200 + is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the eDR 5200 + are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]fabsurplus.com — fabsurplus.comfabsurplus.com
- [5]KLA Tencor | Current Products — kla-tencor.com (Feb 7, 2009)web.archive.org
Last updated Oct 4, 2026.
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