KLA
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The KLA Archer 10 is an automated overlay registration measurement system. The Archer 10 uses a coherence probe interference microscope for overlay metrology. The Archer 10 handles 200mm wafers with a dual open wafer handler.[1][2]
Performance
Fully automated overlay measurement module[1]
Optics
Coherence probe interference microscope[1]
The Archer 10 XT Overlay is used for wafer overlay measurement in semiconductor lithography control.[2]
The Archer 10 XT Overlay is used for wafer overlay measurement in semiconductor lithography control.[2]
The Archer 10 automated misregistration system is a 200 mm dual open tool with KLA Stepper Setup integration software, a Windows NT based user interface, an integrated user interface, a 19 inch LCD screen, a 3.5 inch floppy drive, a CD ROM drive, video hard copy printing, and network readiness.[1]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Archer 10 XT Overlay | — | — | Refurbishment-upgraded components and software version 5.6; XP computer upgrade; KLASS RS2 computer; 5 AMS; digitizer; LINNIK; PDA; PZT-P-Z feedback | waferpedia.com[2] |
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The KLA Archer 10 supports 200 mm wafers with a dual port open wafer handler.[1][2]
The Archer 10 uses a coherence probe interference microscope for overlay measurement.[1]
The Archer 10 runs on Windows NT-based software with a user interface displayed on a 19-inch LCD screen. The Archer 10 XT variant includes software version 5.6 and an XP computer upgrade.[1][2]
Yes, the Archer 10 is a fully automated overlay measurement system that includes automated wafer handling.[1]
The Archer 10 XT variant includes options such as 5 AMS, Digitizer, LINNIK, PDA, and PZT with Z feedback.[2]
The Archer 10 XT uses a KLASS RS2 computer and has an XP computer upgrade.[2]
The following facts about the Archer 10 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer 10 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Archer 10 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Archer 10 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Archer 10 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Archer 10 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 7, 2026.