Hitachi

S 8820

Metrology & Inspection Hitachi S 8820 family

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S 8820 — Inventory photo — Fig. 01S 8820Inventory photo^[1]

Power

700-1300 V^[1]

Vacuum

Scroll pumps not included^[1]

Optics

CCD Camera^[1]

What it is

The Hitachi S 8820 is a metrology and inspection electron-beam instrument.^[2]

How it works

General reference — not yet source-verified

A metrology and inspection SEM directs an electron beam at a specimen, forms a high magnification image from the emitted signals, and supports measurement of fine structures and edge placement.

Where it fits in the process flow

General reference — not yet source-verified

The Hitachi S 8820 is used after patterning steps when a fab needs image based measurement of small structures on wafers.

What do the numbers mean?

Power & electrical1

Power supply: 700-1300 V^[1]

Vacuum & pumping2

Scroll pumps not included^[1]
Vacuum / pumping: Scroll pumps not included^[1]

Wafer handling5

Open cassette^[1]; MECS UTC820Z Robot^[1]
Wafer sizes: 6 inch^[1]
Wafer handling: Open cassette^[1]
Wafer handling: MECS UTC820Z Robot^[1]

Optics & imaging7

CCD Camera^[1]; Objective lens:^[1]; FCM Objective lens system^[1]
Optics / imaging: CCD Camera^[1]
Optics: FCM Objective lens system^[1]
Optics: Electromagnetic condenser^[1]
Optics: Thin aperture with heater^[1]

Control & software2

Software^[1]
Control / software: Software^[1]

Configuration & options11

HDD^[1]; SECS / GEM^[1]; (2) Load ports^[1]
Measuring size: 0.1-10 μm^[1]; Electromagnetic condenser^[1]; Thin aperture with heater^[1]
Type: SEM (Scanning Electron Microscope)^[1]
Configuration / options: HDD^[1]
Configuration / options: SECS / GEM^[1]
Configuration / options: (2) Load ports^[1]
Vintage: 1996^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power supply700-1300 V^[1]
ConfigurationScroll pumps not included^[1]
Vacuum / pumpingScroll pumps not included^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Hitachi S 8820?

The Hitachi S 8820 is a metrology and inspection instrument.^[2]

What kind of microscope is the Hitachi S 8820?

The Hitachi S 8820 is a scanning electron microscope.^[1]

Not publicly documented

The following facts about the S 8820 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 8820 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 8820 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 8820 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 8820 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 8820 is not on record.
Answerable by: an OEM datasheet or a fab qualification report