Hitachi
S 7800 DR-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi S 7800 is a Critical Dimension Scanning Electron Microscope (CD-SEM) used for measuring critical dimensions on 8-inch wafers. The S 7800 achieves a standard resolution of 5 nm at 1 kV and a high-resolution mode of 1 nm in Single Spot X/Y Mode. The S 7800 includes stage travel of 0–200 mm in X and Y, and a throughput of 5 wafers per hour.[1]
What it is
The Hitachi S 7800 is a critical dimension scanning electron microscope (CD-SEM) designed for metrology and inspection. The S 7800 accepts 8-inch wafers. The S 7800 achieves a standard resolution of 5 nm at 1 kV. In high-resolution mode (Single Spot X/Y Mode), the resolution is 1 nm. Low magnification resolution (W/Z Mode) is 5 nm. Measurement precision is static 3 sigma ±0.010 µm. Positioning accuracy (X/Y) is ±15 µm. Rotation precision is ±60 µm. Pre-alignment accuracy (X/Y) is ±15 µm. Stage travel ranges are X and Y 0–200 mm, Z 4–12 mm, rotation 0–360°, and tilt 0–60°. Throughput is 5 wafers per hour. The vacuum system does not include vacuum pumps. Additional hardware includes a chiller and a transformer. Software features include AutoLive Software, Automatic Beam Current Control, Automatic Sample Control, Automatic Defect Review, and Automatic Navigation.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Stage vibration at higher magnifications
- Hard disk defective
- Process chamber has surface rust
What do the numbers mean?
Vacuum & pumping1
Wafer handling1
Optics & imaging3
Performance4
Control & software1
- Software
- AutoLive Software, Automatic Beam Current Control, Automatic Sample Control, Automatic Defect Review, Automatic Navigation[1]
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum SystemVacuum pumps not included[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the Hitachi S 7800 support?
The S 7800 supports 8-inch wafers.[1]
What is the standard resolution of the S 7800?
The standard resolution is 5 nm at 1 kV.[1]
What is the throughput of the S 7800?
The throughput is 5 wafers per hour.[1]
What is the stage travel range of the S 7800?
Stage travel ranges are X and Y 0–200 mm, Z 4–12 mm, rotation 0–360°, and tilt 0–60°.[1]
Not publicly documented
The following facts about the S 7800 DR-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 7800 DR-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 7800 DR-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 7800 DR-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the S 7800 DR-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the S 7800 DR-SEM are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Aug 20, 2026.
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