Hitachi
S 3200 N
What it is
The Hitachi S 3200 N is a scanning electron microscope (SEM) used for metrology and inspection applications.[1][2]
The system includes a Robinson backscattered electron (BSE) detector.[1][2]
How it works
General reference — not yet source-verifiedThe S 3200 N forms an image by scanning a focused electron beam across the sample surface and detecting the signals produced by electron-matter interactions.
Where it fits in the process flow
General reference — not yet source-verifiedScanning electron microscopes of this class are used in semiconductor fabrication for high-magnification inspection and metrology of micro-scale features on wafers and devices.
In a fab environment, such an SEM is commonly employed for failure analysis, process development, and quality control, examining cross-sections or surface topography alongside complementary techniques like EDX for elemental composition.
Applications
General reference — not yet source-verifiedThe S 3200 N is used for imaging sample surfaces at high magnification, with both secondary electron and backscattered electron detection for topographical and compositional contrast.
What do the numbers mean?
Vacuum & pumping1
- Two Vacuum Pumps[1]
Optics & imaging2
- Robinson Back Scatter Detector[1]
Control & software2
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationTwo Vacuum Pumps[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the S 3200 N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 3200 N are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 3200 N are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 3200 N are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 3200 N are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 3200 N is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]uol.de — uol.deuol.de
Last updated Oct 11, 2026.
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