Hitachi

Kokusai DJ 823 V 8 BL

Thermal / Diffusion Hitachi Kokusai family

Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

General reference — not yet source-verified

The Hitachi Kokusai DJ 823 V 8 BL is a furnace used for thermal and diffusion processing in semiconductor manufacturing.

How it works

General reference — not yet source-verified

A diffusion furnace heats wafers in a controlled tube or chamber so dopant atoms can move into the semiconductor surface or so thermal steps can change film or material properties.

Batch furnaces process multiple wafers together in a single thermal cycle.

Where it fits in the process flow

General reference — not yet source-verified

Thermal diffusion furnaces sit in the front end of semiconductor processing, after wafer preparation and before later patterning and back end integration steps.

Applications

General reference — not yet source-verified

Diffusion furnaces are used for doping, drive in steps, oxidation related thermal processing, and other heat driven transformations on semiconductor wafers.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Not working

What do the numbers mean?

Wafer handling2

Wafer Size: 8 inch^[1]
Batch Size (oven size): 75 wafers^[1]

Configuration & options4

Furnace Frame^[1]; Batch of 75wfr (oven size)^[1]; Not working^[1]
Vintage: 1997^[1]

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Kokusai DJ 823 V 8 BL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DJ 823 V 8 BL are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DJ 823 V 8 BL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DJ 823 V 8 BL are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Kokusai DJ 823 V 8 BL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Kokusai DJ 823 V 8 BL are on record.
Answerable by: an OEM parts catalog or a service engineer