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Headway

PWM 32 PS R 790 Spin

Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Headway PWM 32 PS R 790 is a spinner system. The Headway PWM 32 PS R 790 uses an R790 bowl with a 7.9-inch inner diameter. The Headway PWM 32 PS R 790 has a PS motor rated up to 10,000 rpm.[1]

HeadwayPWM 32 PS R 790 Spin
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What it is

The Headway PWM 32 PS R 790 Spin is a spin coater system.[2][1]

The PWM32-PS-R790 is a spinner system with a PS motor package and an R790 bowl.[1]

How it works

The PWM32-PS-R790 uses a PS motor rated up to ten thousand rpm for relatively light loads such as silicon wafers and small photomasks.[1]

The R790 bowl has a seven point nine inch inside diameter and a removable splash deflector that reduces the maximum recommended substrate dimension to five inches.[1]

Where it fits in the process flow

The PWM32-PS-R790 is intended for relatively light loads such as silicon wafers and small photomasks, and the accessory substrate lifter and alignment tool is used to center the substrate during loading and unloading.[1]

Applications

The PWM32-PS-R790 is used for relatively light loads such as silicon wafers and small photomasks.[1]

The R790 package includes a stainless steel bowl with two drain lines and a surrounding plenum with an air exhaust port for pulling air down through the bowl and out of the lab environment.[1]

What do the numbers mean?

Wafer handling1

Maximum recommended substrate dimension
5 inches[1]
Accurate?

Configuration & options6

Model
PWM 32 PS R 790[2]
Accurate?
Make
Headway[2]
Accurate?
Type
Spin Coater[2]
Accurate?
Spinner system
PS Motor[1]
Accurate?
Motor speed
up to 10,000 rpm[1]
Accurate?
Bowl inner diameter
7.9-inch I.D.[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
PWM32-PS-R790——Up to 10,000 rpm for relatively light loads such as silicon wafers and small photomasks, with substrates up to a 5-inch maximum.headwayresearch.com[1]
PWM32-PS-CB15——Up to 10,000 rpm for relatively light loads such as silicon wafers and small photomasks, with substrates up to a recommended 8-inch maximum.headwayresearch.com[1]
PWM32-BD-CB15——Up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, and substrates requiring high inertia chucks, with substrates up to a recommended 12-inch maximum.headwayresearch.com[1]
PWM32-BD-LS22——For substrates larger than 12 inches, or for heavy substrates at higher than 2,500 rpm.headwayresearch.com[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the PWM 32 PS R 790 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PWM 32 PS R 790 Spin are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the PWM 32 PS R 790 Spin are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the PWM 32 PS R 790 Spin are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the PWM 32 PS R 790 Spin is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the PWM 32 PS R 790 Spin are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]headwayresearch.com — headwayresearch.comheadwayresearch.com
  2. [2]Equipment inventory listing
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Last updated Oct 8, 2026.

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