GCA
The GCA 3696 is a step-and-repeat camera (or stepper) built around the DEC PDP-11/04 minicomputer using a 9280 Interface Chassis. The GCA 3696 was one of the first step-and-repeat cameras (or steppers) made by Mann/GCA. The GCA 3696 can be easily converted to function as a GCA 3696 Photorepeater system for exposing photoresist coated glass plates up to 7 inches.[1][2]
Wafer size
150mm
Node / era
legacy semiconductor lithography equipment
Performance
Typically <0.25µm[2]
Gas delivery
Photoresist-coated glass plates[2]
Optics
g-line (436nm)[2]
The GCA 3696 projects an image of a reticle onto a photoresist-coated glass plate and steps the plate to expose an array of identical die patterns. The system is built around a Digital Equipment Corporation PDP-11/04 minicomputer and uses a 9280 Interface Chassis. Operator control is via a VT100 console terminal, and data storage is on 8-inch floppy disk drives. When configured as a photorepeater, the system accommodates glass plates up to 7 inches in size.[1][2]
Process applications and technology nodes documented for this tool.
Documented failure modes, common issues, and field considerations.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| GCA 6300 DSW 5X g-line Wafer Stepper | g-line | — | Described as a wafer stepper that can be converted to function as a GCA 3696 Photorepeater system. | cnfusers.cornell.edu[2] |
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The GCA 3696 is a step-and-repeat camera (photorepeater) made by Mann/GCA, one of the first of its kind.[1]
The system can expose photoresist-coated glass plates up to 7 inches in size.[2]
The system uses a 9280 Interface Chassis.[1]
Operator interaction is through a VT100 console terminal, and data storage is on 8-inch floppy disk drives.[1]
The following facts about the 3696 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3696 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 3696 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented compatible parts, consumables, or accessories for the 3696 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 3696 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Last updated Aug 13, 2026.
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