Waferpedia

Filmetrics

F10-VC

The Filmetrics F10-VC is a spectrometer that simultaneously measures accurate reflectance and transmittance. The F10-VC captures reflectance and transmittance spectra with a single mouse click. The F10-VC measures in a wavelength range of 380-1050 nm.[1][2][3]

F10-VC — web.archive.org
Fig. 01F10-VCweb.archive.org[1]

Produced

2008–

Optics

15 nm–70 µm[1]

What it is

The F10-VC is part of the Filmetrics F10-VC family that includes variants with different wavelength and thickness ranges. The F10-VC package includes an integrated spectrometer and light source unit, FILMeasure software, reference materials, connecting cables, and an operator's manual.[1]

How it works

The F10-VC captures reflectance and transmittance spectra with a single mouse click. The instrument supports minimum and maximum reflectance and transmittance reporting, full width at half maximum analysis, color analysis, and optional thickness and index measurement modules.[1][2]

The F10-VC is offered with multiple wavelength ranges and thickness ranges across its variants. The instrument can export and print data easily.[1]

Where it fits in the process flow

General reference — not yet source-verified

The F10-VC fits in thin-film characterization rather than in film deposition or patterning. The instrument is used after a film has been formed to evaluate optical response and thickness-related properties.

Applications

The F10-VC is used for vacuum coating analysis.[2]

  • biomedical
  • displays
  • hardcoats
  • metals
  • ophthalmics
  • optics
  • parylene
  • PCBs & PWBs
  • OSP/Cu finishes
  • porous silicon
  • semiconductors
  • failure analysis
  • MEMS
  • process films
  • teaching labs
  • solar PV
  • thick resist
  • vacuum coatings
  • web inspection

What do the numbers mean?

Wafer handling1

Substrate size
~5 mm × 5 mm to 200 mm diameter[4]
Accurate?

Optics & imaging16

Thickness range (F10-VC)
15 nm–70 µm[1]
Accurate?
Wavelength range (F10-VC)
380–1050 nm[1]
Accurate?
Thickness range (F10-VC-UV)
1 nm–50 µm[1]
Accurate?
Wavelength range (F10-VC-UV)
200–1100 nm[1]
Accurate?
Thickness range (F10-VC-NIR)
100 nm–100 µm[1]
Accurate?
Wavelength range (F10-VC-NIR)
950–1700 nm[1]
Accurate?
Thickness range (F10-VC-EXR)
15 nm–100 µm[1]
Accurate?
Wavelength range (F10-VC-EXR)
380–1700 nm[1]
Accurate?
Wavelength range
380–1050 nm[4]
Accurate?
Minimum thickness
15 nm[4]
Accurate?
Minimum thickness to measure n and k
100 nm[4]
Accurate?
Wavelength range for F10-VC-UV
200-1100nm[1]
Accurate?
Wavelength range for F10-VC-NIR
950-1700nm[1]
Accurate?
Wavelength range for F10-VC-EXR
380-1700nm[1]
Accurate?
Thickness range (base F10-VC)
15 nm – 70 µm[1]
Accurate?
Wavelength range (base F10-VC)
380–1050 nm[1]
Accurate?

Control & software1

Included software
FILMeasure 5.0 software[1]
Accurate?

Configuration & options11

Measurement mode
simultaneous reflectance and transmittance measurements[1]
Accurate?
Spectral capture
captures reflectance and transmittance spectra with a single mouse click[1]
Accurate?
Included reference materials
BK-7 reference material, Al2O3 reference material, and Si reference material[1]
Accurate?
Included documentation
hardcopy of Operator's Manual[1]
Accurate?
Warranty
two-year warranty[1]
Accurate?
Spot size
1.5 mm[4]
Accurate?
Thickness range
15nm-70µm[1]
Accurate?
Thickness range for F10-VC-UV
1nm-50µm[1]
Accurate?
Thickness range for F10-VC-NIR
100nm-100µm[1]
Accurate?
Thickness range for F10-VC-EXR
15nm-100µm[1]
Accurate?
Measurement type
Simultaneous reflectance and transmittance[1]
Accurate?

Vintage & configurations

  1. 2008-08-12Release announcement[2]

    Filmetrics announced the release of the F10-VC on August 12, 2008.

  2. 2008Production start[2]

    Announced release of F10-VC

Documented models & variants

DesignationGenerationVintageChangesSource
F10-VC-UV——Thickness range 1 nm–50 µm; wavelength range 200–1100 nm.web.archive.org[1]
F10-VC-NIR——Thickness range 100 nm–100 µm; wavelength range 950–1700 nm.web.archive.org[1]
F10-VC-EXR——Thickness range 15 nm–100 µm; wavelength range 380–1700 nm.web.archive.org[1]
F10-VC——Base model with 15 nm-70 µm thickness range and 380-1050 nm wavelength range.web.archive.org[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the wavelength range of the F10-VC?

The standard F10-VC operates over a wavelength range of 380 to 1050 nm.[1][4]

What is the minimum thickness measurable?

The minimum thickness is 15 nm.[1][4]

What optional upgrades are available?

Optional software upgrades provide thickness measurement (UPG-F10-VC-d) and index measurement (UPG-F10-VC-nk) capabilities.[1]

When was the F10-VC released?

The F10-VC was announced in August 2008.[2][3]

Not publicly documented

The following facts about the F10-VC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • The control-system platform and OS era of the F10-VC are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F10-VC are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F10-VC is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the F10-VC are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the F10-VC are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]pr.com — pr.compr.com
  3. [3]Filmetrics Releases New F10-VC Spectrometer for Vacuum Coating Applications — express-press-release.netexpress-press-release.net
  4. [4]confluence.nanofab.ualberta.ca — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
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Last updated Oct 5, 2026.