Edwards
Spectra G 800
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards Spectra G 800 is a gas abatement system for nitride-based MOCVD processes. The Spectra G 800 employs 4-stage combustion and can treat gases including H2, NH3, TMGa, TMAI and TMIn. The Spectra G 800 has a maximum gas flow rate of 800 slm.[1]
What it is
The Edwards Spectra G 800 is a gas abatement system designed for the treatment of exhaust gases from semiconductor manufacturing processes. The system is specifically intended for nitride-based metalorganic chemical vapor deposition (MOCVD) processes that use large flows of hydrogen and ammonia.[1]
How it works
The Spectra G 800 uses a 4-stage combustion process to break down hazardous gases. The system incorporates a powder handling system to manage solid byproducts and an intuitive control display panel for operator interface.[1]
Where it fits in the process flow
General reference — not yet source-verifiedIn a typical nitride MOCVD installation, the abatement system handles the hydrogen-rich and ammonia-rich exhaust from the deposition chamber. Effective abatement is critical for safety and environmental compliance because ammonia and metalorganic precursors are toxic and flammable.
What do the numbers mean?
Power & electrical4
Vacuum & pumping2
Gas & chemistry1
Dimensions & facilities1
Configuration & options5
- 4 port inlets[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many inlet ports does the Spectra G 800 support?
The system can be configured with one to four inlet ports.[1]
What are the electrical requirements of the Spectra G 800?
The electrical supply is 200-208 VAC, 3-phase, at 50 or 60 Hz, with a power consumption of 4 kW.[1]
Which gases can be treated by the Spectra G 800?
The system can treat hydrogen, ammonia, trimethylgallium, trimethylaluminum, and trimethylindium. Other gases may be handled after consultation with an exhaust management specialist.[1]
Not publicly documented
The following facts about the Spectra G 800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Spectra G 800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Spectra G 800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Spectra G 800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Spectra G 800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Spectra G 800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — bocedwards.com (Jun 17, 2007)web.archive.org
- [2]Inventory photo
- [3]Inventory photo
Last updated Oct 2, 2026.
Compare with similar tools
View all →The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
The Semitool 11600 SRD is a spin rinse dryer manufactured by Semitool.