Edwards

iXH 1220 HTX Dry

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The Edwards iXH 1220 HTX is a dry pump. The Edwards iXH 1220 HTX has an inlet of ISO100. The Edwards iXH 1220 HTX has a pumping speed of 735.72 CFM.^[1]^[2]

EdwardsiXH 1220 HTX Dry

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What it is

The Edwards iXH 1220 HTX has an ISO100 inlet and a KF40 exhaust. The pump provides a pumping speed of 735.72 CFM. The ultimate pressure is 3.7 x 10^-3 Torr. The pump weighs 1,007 lbs.^[2]

Applications

The Edwards iXH 1220 HTX is used in a range of semiconductor processes including load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, stripping/ashing, oxide etch, silicon etch, metal etch, implant source, HPD-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, and ALD.^[2]

What do the numbers mean?

Vacuum & pumping4

Type of product: dry pump^[2]
Exhaust: KF40^[2]
Pumping speed: 735.72 CFM^[2]
Ultimate pressure: 3.7 x 10-3 Torr^[2]

Dimensions & facilities1

Weight: 1,007 lbs^[2]

Configuration & options3

Manufacturer: Edwards^[1]
Model: iXH 1220 HTX^[1]
Inlet: ISO100^[2]

Vintage & configurations

2003Vintage^[1]
The model is described as 2003 vintage.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Type of productdry pump^[2]
ExhaustKF40^[2]
Pumping speed735.72 CFM^[2]
Ultimate pressure3.7 x 10-3 Torr^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the iXH 1220 HTX Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the iXH 1220 HTX Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the iXH 1220 HTX Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the iXH 1220 HTX Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the iXH 1220 HTX Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the iXH 1220 HTX Dry are on record.
Answerable by: an OEM parts catalog or a service engineer