CHA
Mark 50 C Vacuum
What it is
The CHA Mark 50 C vacuum evaporator supports 6-inch wafers. The system includes a dry pump (Edwards CDP 80), two cryogenic compressors (CTI 9600), and an on-board cryogenic pump and water pump. The system is powered by a CHA SR 10 D 212 power supply and operates on 208 V AC, 3-phase, 150 A electrical service. The cooling water requirement is 9.25 GPM, and the compressed air requirement is 90–100 psi.[1]
What do the numbers mean?
Power & electrical2
Vacuum & pumping2
Configuration & options5
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- 3 Phase
- 208 VAC
- 50/60 Hz
- 150 A
- Water: 9.25 GPM
- Air: 90-100 Psi
- Sub Modukle
- Dry Pump: Edwards CDP 80
- Compressor #1: CTI 9600
- Compressor #2: CTI 9600
- Power Supply: CHA SR 10 D 212
- On-Board 400 Cryy Pump
- On-Board Waterpump
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Mark 50 C Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 50 C Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 50 C Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 50 C Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 50 C Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 50 C Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 24, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13622 is an RF match unit intended for PVD (Physical Vapor Deposition) described as a High Efficiency HE RF Match-Bias.
The Applied Materials 0020 12458 Part is an insulator, side match component for the Hdp-Cvd Ultima Plus system.