Cascade Microtech
EPS150
The Cascade Microtech EPS150 is a probe station. The Cascade Microtech EPS150 is a manual probe system with 4 independent probe micro-manipulators. The Cascade Microtech EPS150 is configured with a Keithley 2450 SourceMeter SMU and an Agilent 4284A LCR meter.[1][2]
What it is
How it works
Where it fits in the process flow
The Cascade Microtech EPS150 Triax is used in device characterization rather than in material deposition or pattern transfer.[1]
Applications
The Cascade Microtech EPS150 Triax supports I-V characterization, low current measurements, C-V characterization at multiple frequencies, resistance and conductance measurements, and sheet resistance and resistivity measurements of substrates and deposited films.[1]
The probe station is configured with a Keithley 2450 SourceMeter SMU and an Agilent 4284A LCR meter for measuring current, voltage, resistance, capacitance, and conductance.[1][3]
The four-point resistivity probing system is used for sheet resistance and resistivity measurements of substrates and thin films.[1][3]
- I-V characterization
- Low current measurements
- C-V characterization (at multiple frequencies)
- Resistance and conductance measurements
- Sheet resistance and resistivity measurements of substrates and deposited films
What do the numbers mean?
Power & electrical3
Wafer handling1
- Applications
- I-V characterization; low current measurements; C-V characterization at multiple frequencies; resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[2]
Optics & imaging2
Performance1
Configuration & options11
- Manual probe system with 4 independent probe micro-manipulators[3]
What replaced it?
Related models
- siblingSignatone S-302-4— Four-point resistivity probe station used with the probe station system.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurements does the EPS150 support?
The EPS150 supports current, voltage, resistance, capacitance, and conductance measurements.[1]
What electrical characterization modes does the EPS150 support?
The EPS150 supports I-V characterization, low current measurements, and C-V characterization at multiple frequencies.[2]
Not publicly documented
The following facts about the EPS150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EPS150 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EPS150 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EPS150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EPS150 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EPS150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
Last updated Oct 9, 2026.
