Axcelis

NV GSD 200 E 2 Ion

Ion Implantation Axcelis NV GSD 200 family

Research Quality: 20% complete

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NV GSD 200 E 2 Ion — Inventory photo — Fig. 01NV GSD 200 E 2 IonInventory photo^[1]

Power

CTI 9650 Low-Voltage^[1]

Vacuum

Seiko STP A 2203 fully refurbished^[1]

What is it?

What do the numbers mean?

Power & electrical3

Cryo-Kompressor: CTI 9650 Low-Voltage^[1]
High voltage-Transformer: Oil^[1]
Voltage: 208V^[2]

Vacuum & pumping10

Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished^[1]
Turbo-Pumps: Seiko STP A 2203 fully refurbished^[1]
Terminal-Rough-Pump: without (Edwards IGX Config)^[1]
End station Rough-Pump: without (Edwards IGX Config) bottom remote external^[1]
Gas box: 5-String, 4x 2L Low-Pressure^[1]
String 1: Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3^[1]
String 2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380^[1]
String 3: Ash3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380^[1]
String 4: Ph3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380^[1]
Cryo-Pumps: CTI/Edwards Onboard: OB-8 + OB-10^[2]

Wafer handling1

String 5: Argon Carriergas; MFC Brooks GF120 10sccm-N2^[1]

Control & software2

Software-Version: 6.13.5.1 (no license included)^[1]
Cell-Controller: V6 Type^[1]

Configuration & options8

Disk-Drive: Direct-Drive^[1]
Dose-Type: Regular^[1]
Source-Type: ELS4 IHC-Source without Vaporizer^[1]
Light-Tower: red/yellow/green; no buzzer^[1]
Main-Workstation: SUN Solaris AXI 3HE (special case)^[1]
Network: 24 port 100MB Ethernet with Cisco Router-Kit^[1]
Energy Config: 0 - 160Kv High current^[2]
CE-Conformity: Yes^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Cryo-PumpsCTI/Edwards Onboard; OB-8 + OB-10 fully refurbished^[1]
Cryo-KompressorCTI 9650 Low-Voltage^[1]
Turbo-PumpsSeiko STP A 2203 fully refurbished^[1]
Terminal-Rough-Pumpwithout (Edwards IGX Config)^[1]
End station Rough-Pumpwithout (Edwards IGX Config) bottom remote external^[1]
Gas box5-String, 4x 2L Low-Pressure^[1]
String 1Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3^[1]
String 2BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380^[1]
String 3Ash3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380^[1]
String 4Ph3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380^[1]
High voltage-TransformerOil^[1]
Voltage208V^[2]
Cryo-PumpsCTI/Edwards Onboard: OB-8 + OB-10^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NV GSD 200 E 2 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD 200 E 2 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD 200 E 2 Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD 200 E 2 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD 200 E 2 Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD 200 E 2 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report