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ASML

4022.456.0049.1 Optical Stage

4022.456.0049.1 Optical Stage — Inventory photo
Fig. 014022.456.0049.1 Optical StageInventory photo[1]

What it is

The ASML 4022.456.0049.1 Optical Stage is a precision optics component in the ASML 4022.456.0049.1 family.[3][2]

How it works

General reference — not yet source-verified

An optical stage is a precision motion platform that positions optical components with controlled movement and stable placement.

A stage in this class supports alignment and repeatable placement in an optical system, where mechanical accuracy and positional stability are central to operation.

Where it fits in the process flow

The ASML 4022.456.0049.1 Optical Stage is part of a tool family used in a precision optics context rather than as a standalone process module.[3][2]

Applications

General reference — not yet source-verified

Precision optical stages are used for controlled positioning in optical instrumentation and alignment-sensitive assemblies.

What do the numbers mean?

Optics & imaging2

193 nm[1]
Accurate?
Optics & imaging
193 nm[2]
Accurate?

Configuration & options6

ASML 4022.456.1144[1]
Accurate?
ASML 4022.456.1094[1]
Accurate?
Unit tested in good working condition[1]
Accurate?
Configuration & options
ASML 4022.456.1144[2]
Accurate?
Configuration & options
ASML 4022.456.1094[2]
Accurate?
Condition
Unit tested in good working condition[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the ASML 4022.456.0049.1 Optical Stage classified as?

The ASML 4022.456.0049.1 Optical Stage is classified as a precision optics component.[2][3]

Is a broader model family identified for the ASML 4022.456.0049.1 Optical Stage?

The ASML 4022.456.0049.1 Optical Stage is part of an ASML 4022.456.0049.1 Optical Stage family.[3]

Not publicly documented

The following facts about the 4022.456.0049.1 Optical Stage are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4022.456.0049.1 Optical Stage are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4022.456.0049.1 Optical Stage are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4022.456.0049.1 Optical Stage are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4022.456.0049.1 Optical Stage are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4022.456.0049.1 Optical Stage is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]ASML 4022.456.0049.1 Optical Stage family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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