Applied Materials
SEMVision G 2 CD-SEM
The Applied Materials SEMVision G 2 CD-SEM is a critical dimension scanning electron microscope. The Applied Materials SEMVision G 2 CD-SEM is used for metrology and inspection. The Applied Materials SEMVision G 2 CD-SEM is configured for 12-inch wafers.[1][2]
What it is
The Applied Materials SEMVision G 2 is a CD-SEM for metrology and inspection. The tool is a critical dimension scanning electron microscope.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedA CD-SEM sits in the metrology and inspection flow of semiconductor manufacturing. The tool is used after patterning steps to check feature dimensions and support process control.
Applications
What do the numbers mean?
Wafer handling1
Control & software2
- HDD & Software included[1]
Dimensions & facilities1
Configuration & options7
- With EDX (Energy Dispersive X-ray Spectroscopy)[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Hitachi S 8820 CD-SEM— Same function class: Metrology & Inspection, nullCompare in depthsource[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the main difference between a CD-SEM and a regular SEM?General reference — not yet source-verified
A CD-SEM is optimized for automated, high-precision dimensional measurements of patterned semiconductor features, with built-in algorithms for edge detection and metrology. A general-purpose SEM is more flexible for imaging and analysis but lacks the specialized measurement routines, calibration schemes, and repeatability required for production-line critical-dimension control.
How does a CD-SEM avoid damaging the wafer during measurement?General reference — not yet source-verified
CD-SEMs operate with low accelerating voltages and low probe currents to minimize electron-beam-induced resist or film damage. The scanning is also controlled to limit cumulative exposure, enabling non-destructive, in-line measurements that allow wafers to continue through the fabrication process.
Is a CD-SEM used for defect detection or only for measurement?General reference — not yet source-verified
The instrument is specifically for measurement and characterization of feature dimensions, not for broad defect detection. While it may reveal local shape anomalies during measurement, dedicated optical or electron-beam inspection tools are used to find and classify randomly distributed defects across the wafer.
Not publicly documented
The following facts about the SEMVision G 2 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEMVision G 2 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SEMVision G 2 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SEMVision G 2 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEMVision G 2 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEMVision G 2 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
Last updated Oct 11, 2026.
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