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Applied Materials

Endura CL

DepositionApplied Materials Endura family
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Endura CL — Inventory photo
Fig. 01Endura CLInventory photo[1]

What it is

General reference — not yet source-verified

The Endura CL class of equipment is a wafer-fabrication deposition system used in semiconductor manufacturing.

The Endura CL is configured as a multi-chamber system in which individual process chambers perform dedicated functions.

How it works

General reference — not yet source-verified

Endura CL equipment is a cluster-type platform that transfers wafers under vacuum between multiple process chambers.

The Endura CL equipment uses physical vapor deposition to deposit thin films of material onto a wafer.

Where it fits in the process flow

General reference — not yet source-verified

In a typical fabrication flow, the Endura CL deposition step often takes place after the wafer has been patterned and before subsequent deposition steps.

The Endura CL platform often connects to a coater, a cleaner, or other modules through a vacuum transport system.

Applications

General reference — not yet source-verified

The Endura CL deposition equipment is used to form thin films for interconnect layers in semiconductor devices.

The Endura CL is used for depositing metal films, commonly in back-end-of-line metallization.

What do the numbers mean?

Power & electrical6

Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
Voltage
400V[1]
Accurate?
RF Power Supply[1]
Accurate?
Source DC Power Supply[1]
Accurate?
Generator Rack (x3)[1]
Accurate?

Control & software1

Chamber
D (PC-XT), 1 (IMP), 2/3 (TxZ)[2]
Accurate?

Configuration & options25

Preclean[3]
Accurate?
ESIP TAN (No Target)[4]
Accurate?
Degas STD[5]
Accurate?
4 wires[1]
Accurate?
Chamber 1:[1]
Accurate?
SIP-TA(N)[1]
Accurate?
Chamber 2:[1]
Accurate?
SIP-CU[1]
Accurate?
Chamber 3:[1]
Accurate?
Chamber 4:[1]
Accurate?
process type None[1]
Accurate?
Chamber C:[1]
Accurate?
PCXT[1]
Accurate?
Chamber D:[1]
Accurate?
Chamber E
Degas[1]
Accurate?
Chamber F
Degas[1]
Accurate?
SUB Rack
BULE Distribution Rack[1]
Accurate?
Ti[6]
Accurate?
OEM
Applied Materials[3]
Accurate?
Model
Endura CL[3]
Accurate?
Equipment type
Chamber[3]
Accurate?
Chamber configuration
Preclean[3]
Accurate?
Chamber configuration
ESIP TAN (No Target)[4]
Accurate?
Chamber configuration
Degas STD[5]
Accurate?
Vintage
2002[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Preclean—2002—Equipment inventory listing[3]
ESIP TAN (No Target)———Equipment inventory listing[4]
Degas STD———Equipment inventory listing[5]
ESIP TAN——ESIP TAN chamber without targetEquipment inventory listing[4]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • Voltage400V[1]
  • ConfigurationRF Power Supply[1]
  • ConfigurationSource DC Power Supply[1]
  • ConfigurationGenerator Rack (x3)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the Endura CL?

The Endura CL is a chamber (a deposition platform) made by Applied Materials.[5][7]

What is the make of the Endura CL?

The Endura CL is made by Applied Materials.[5][7]

Not publicly documented

The following facts about the Endura CL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura CL are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Endura CL are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Endura CL are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Endura CL is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Endura CL are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (9)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing
  8. [8]Equipment inventory listing
  9. [9]Equipment inventory listing
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Last updated Sep 27, 2026.

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