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Applied Materials

Centura DPS 2 G 5

EtchApplied Materials Centura DPS family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Applied Materials Centura DPS 2 G 5 is an etcher with a Metal 3ch and Axiom 1ch configuration, dating from 2008.[1]

Applied Materials logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Applied Materials Centura DPS 2 G 5 is an etch tool.[1]

The Centura DPS 2 G 5 belongs to the Applied Materials Centura DPS family.[2]

How it works

General reference — not yet source-verified

An etch tool removes selected material from a wafer by exposing the surface to a controlled process environment.

Plasma-based etch systems commonly use a chamber with controlled gas flow, power delivery, and wafer handling to shape the etch rate and selectivity.

Where it fits in the process flow

General reference — not yet source-verified

An etch tool sits in the wafer fabrication flow after pattern transfer has defined the regions to be removed.

An etch tool typically works after a masking step and before downstream cleaning, inspection, or further film formation.

What do the numbers mean?

Configuration & options2

Metal 3ch, Axiom 1ch[1]
Accurate?
Vintage
2008[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the Centura DPS 2 G 5?

The Centura DPS 2 G 5 is an etch tool.[1]

Which company makes the Centura DPS 2 G 5?

Applied Materials makes the Centura DPS 2 G 5.[1][2]

What family does the Centura DPS 2 G 5 belong to?

The Centura DPS 2 G 5 belongs to the Centura DPS family.[2]

Not publicly documented

The following facts about the Centura DPS 2 G 5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the Centura DPS 2 G 5 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura DPS 2 G 5 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura DPS 2 G 5 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura DPS 2 G 5 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura DPS 2 G 5 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Centura DPS 2 G 5 Mesa — Applied Materials | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 25, 2026.

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