Advanced Energy
MDX-10K
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Advanced Energy MDX-10K is a 10kW DC magnetron power supply for thin-film deposition and sputtering applications. The MDX-10K features ARC-OUT arc suppression and 0.25% regulation accuracy across Power, Current, and Voltage modes.[1]
What it is
The Advanced Energy MDX-10K is a DC magnetron power supply originally built for thin-film deposition and sputtering applications.[1]
How it works
The MDX-10K provides stable and precise power delivery with regulation accuracy of 0.25% in Power, Current, and Voltage modes.[1]
The supply uses high-frequency conversion techniques to achieve low stored energy, with a response time of 5 µs to plasma load changes.[1]
The MDX-10K features ARC-OUT arc suppression circuitry to reduce arc-induced splatter and thermal shock. Voltage tap configurations (Standard Z, Low Z, High Z) accommodate various magnetron impedances. The unit includes automatic limiting under overcurrent, overvoltage, or overpower conditions.[1]
What do the numbers mean?
Power & electrical15
Vacuum & pumping1
Performance2
Control & software1
Dimensions & facilities2
Configuration & options17
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- DescriptionRF GENERATOR[2]
- Power10 kW[1]
- TypeDC magnetron power supply[1]
- Output Power10 kW[1]
- Regulation ModesPower, Current, Voltage[1]
- Ripple1% RMS at 100 kHz[1]
- Ignition Voltage1550 V[1]
- Voltage Configuration Standard Z Taps500–600 V, 600–800 V, 800–1000 V[1]
- Voltage Configuration Low Z Taps400–500 V, 500–640 V, 640–800 V[1]
- Voltage Configuration High Z Taps600–775 V, 775–1000 V, 1000–1250 V[1]
- Input Voltage208 V ± 10%, 380 V ± 10%, 415 V ± 10% (3-phase, 50/60 Hz)[1]
- Standard Z Taps500–600 V, 600–800 V, 800–1000 V[1]
- Low Z Taps400–500 V, 500–640 V, 640–800 V[1]
- High Z Taps600–775 V, 775–1000 V, 1000–1250 V[1]
- Analog Control Signals0–5 V for voltage, current, and power control[1]
- Interlock InputsVacuum, water, system[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MDX-10K are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MDX-10K are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MDX-10K are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MDX-10K are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MDX-10K is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MDX-10K are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]aumictechlabs.com — aumictechlabs.comaumictechlabs.com
- [2]dealer listingfabsurplus.com
- [3]dealer listingfabsurplus.com
- [4]dealer listingfabsurplus.com
Last updated Oct 1, 2026.