Advanced Energy
Apex 1513
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Advanced Energy Apex 1513 is an RF generator with an output power of 1.5 kW at 13.56 MHz. The Apex 1513 is used for precision plasma processes in semiconductor and industrial applications.[1][2][3]
What it is
The Advanced Energy Apex 1513 delivers 1.5 kW of RF output power at a frequency of 13.56 MHz. The generator accepts a 208 V AC input; specifications vary between single-phase and three-phase configurations depending on the unit. Available communication interfaces include analog, RS-232, RS-485, and DeviceNet, with optional EtherCAT. The unit uses forced-air cooling.[2][1][3]
What do the numbers mean?
Power & electrical7
Performance1
Control & software1
Dimensions & facilities3
Configuration & options17
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Apex 1513 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Apex 1513 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Apex 1513 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Apex 1513 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Apex 1513 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Apex 1513 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]edv-automation.com — edv-automation.comedv-automation.com
- [2]ebay.com — ebay.comebay.com
- [3]semiconductorspares.com — semiconductorspares.comsemiconductorspares.com
- [4]dealer listingfabsurplus.com
- [5]dealer listingfabsurplus.com
- [6]dealer listingfabsurplus.com
- [7]fabsurplus.comfabsurplus.com
Last updated Sep 29, 2026.