Waferpedia

Tool family

Zeiss Prove Reticle Mask

Zeiss Prove Reticle Mask Inspection.

Models in this family

  1. Zeiss Prove Reticle Mask is a metrology and inspection tool for reticle mask inspection.

    Cited variants

    DesignationGenerationVintageChangesSource
    Compact———Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing