Waferpedia

Tool family

YES 58

YESThermal / Diffusion3 entries
LinkedIn X Email

Models in this family

  1. 58
  2. 58 SM HMDS Vacuum

    The 58 SM HMDS Vacuum is a Yield Engineering (YES) thermal/diffusion oven in the YES 58 family, described as an HMDS vacuum oven and an HMDS vapor prime oven.

  3. 58 TA HMDS Vacuum Bake Vapor Prime

    The Yes 58 TA HMDS Vacuum Bake / Vapor Prime Oven supports vacuum bake vapor prime with HMDS, vacuum bake without HMDS, and image reversal process with gaseous ammonia.

All entries

  1. 58YES
    CategoryThermal / Diffusion
    12 specs
  2. 58 SM HMDS VacuumYES

    The 58 SM HMDS Vacuum is a Yield Engineering (YES) thermal/diffusion oven in the YES 58 family, described as an HMDS vacuum oven and an HMDS vapor prime oven.

    CategoryThermal / Diffusion
    6 specs
  3. 58 TA HMDS Vacuum Bake Vapor PrimeYES

    The Yes 58 TA HMDS Vacuum Bake / Vapor Prime Oven supports vacuum bake vapor prime with HMDS, vacuum bake without HMDS, and image reversal process with gaseous ammonia.

    CategoryThermal / Diffusion
    20 specs