Waferpedia

Tool family

Varian 160 XP

Models in this family

  1. The Varian 160 XP is an ion implanter. A variant, the Varian 160 XP Ion, is configured as a 150 mm high-current implanter.

    Cited variants

    DesignationGenerationVintageChangesSource
    160 XP Ion———waferpedia.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com