Waferpedia

Tool family

Ulvac SIV 200 ITO

UlvacDeposition1 entry

Models in this family

  1. The Ulvac SIV 200 ITO is a sputtering system.

    Cited variants

    DesignationGenerationVintageChangesSource
    SIV-200S——Allows for simultaneous deposition from up to four targets, enhancing throughputtarasemi.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]tarasemi.comtarasemi.com