Tool family
The Tystar Tytan 1600 LPCVD is a low pressure chemical vapor deposition system.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tytan 1600 LPCVD Carbon Nanotube Growth | — | — | Includes rolling resistance furnace with six-zone heating, pre-heated gas line to 150°C, dry scrubber (Jupiter Scientific Callisto), dry pumping system (Edwards iH), and air-to-water heat exchanger; configured for carbon nanotube synthesis with process quartzware for 200mm x 200mm substrates up to 32 sheets. | semistarcorp.com[1] |
| Mini Tytan 1600 Horizontal Furnace, 1 Stack, 150 mm, LPCVD | — | — | Reduced footprint, single tube (1 stack), 150mm wafer size, 50 wafer capacity, 18 inch flat zone; includes host supervisor and loading assist arm; configured for LPCVD. | semistarcorp.com[2] |